ZEISS Unveils New Generation MMZ 1 Coordinate Measuring Machine​ Redefines Nanometer-Level Precision Measurement Benchmark

September 25, 2025 – ZEISS, a global leader in optical and precision measurement technologies, today announced the launch of its new generation MMZ 1 Coordinate Measuring Machine (CMM). Featuring innovative granite material applications and intelligent technology breakthroughs, the machine achieves nanometer-level precision measurement for 5-ton-class large workpieces, delivering revolutionary inspection solutions for high-end manufacturing sectors such as semiconductors and aerospace.

1.Core Technological Breakthroughs: Material Revolution Meets Intelligent System Integration

The MMZ 1 introduces a composite structure of granite Y-shaped guide rails and silicon carbide plungers, leveraging the exceptional thermal stability of natural granite (thermal expansion coefficient as low as 0.35ppm/℃) and the ultra-high rigidity of silicon carbide. This design boosts the device's dynamic stiffness to 120N/μm, tripling the vibration response speed compared to traditional steel guide rails. Paired with ZEISS’ patented pneumatic vibration isolation system, it achieves ±0.5 nanometer-level vibration suppression in industrial environments without expensive foundation construction, meeting the extreme measurement requirements for precision workpieces like EUV lithography mirror substrates and aerospace titanium alloy components.

The integrated intelligent energy management system recovers waste heat from the pneumatic system through cogeneration technology, reducing overall energy consumption by 34%. It also controls ambient temperature fluctuations within ±0.05℃ per hour, exceeding the requirements of the ISO 10360-2 standard by fourfold. Its modular design supports rapid switching of multi-probes including contact probes, laser scanners, and confocal microscopes. Combined with AI algorithms optimizing measurement paths, it enhances inspection efficiency by over 40% compared to conventional equipment.

2.Full Coverage of High-End Manufacturing Scenarios: From Semiconductor Wafers to Aero-Engines

In the semiconductor field, TSMC Nanjing uses the MMZ 1 to inspect 3nm-process EUV photomasks, achieving a line edge roughness (LER) measurement error of <±1 nanometer and reducing photomask defect rates to 0.02ppm, generating an annual benefit of over CNY 120 million per device. In aerospace applications, during the machining of Airbus A350XWB titanium alloy wing spars, the machine compresses surface machining errors from ±5 microns to ±1.2 microns. Rolls-Royce utilizes its nanometer-level detection capability to identify 0.5-micron-scale grain boundary cracks in Trent XWB turbine blades that traditional equipment cannot detect, avoiding potential quality accidents worth CNY 50 million per incident.

3.Leading Industry Standard Upgrades and Global Smart Manufacturing Transformation

The technical parameters of the ZEISS MMZ 1 have directly influenced the revision of the ISO 10360-8 standard, with new nanometer-level measurement uncertainty evaluation methods included in the 2026 draft. The machine supports digital twin virtual commissioning, reducing on-site debugging cycles by 50% and lowering full-life cycle costs by 45%. Certified to EU CE and compliant with REACH environmental regulations, it becomes the world's first high-end inspection equipment to achieve “zero-carbon measurement.”

“The MMZ 1 is more than a measuring machine – it’s an intelligent hub connecting manufacturing data and quality control,” said Dr. Michael Kaschke, Global President of ZEISS Industrial Quality Solutions. “We are collaborating deeply with Chinese semiconductor enterprises to help break through precision bottlenecks in domestic chip manufacturing and drive global high-end manufacturing into the nanometer-precision era.”

Currently, the MMZ 1 has been deployed in volume at enterprises including Huawei Hisilicon, Yangtze Memory Technologies, and AMEC. In the first half of 2025, its installation base in China surged 120% year-on-year, solidifying ZEISS' leading position in the high-end CMM market (58% global market share). As the Hannover Messe and IMTS exhibitions approach, this “industrial microscope” will continue to lead precision measurement technology development, providing core infrastructure support for smart manufacturing.

About ZEISS

ZEISS is a global technology pioneer in optics and optoelectronics, dedicated to shaping the future through innovation. In industrial quality solutions, ZEISS offers a complete portfolio from coordinate measuring machines to automated inspection systems, serving high-end manufacturing sectors such as semiconductors, automotive, and aerospace to drive global manufacturing precision upgrades and intelligent transformation.